Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner

10.1109/OMEMS.2011.6031055

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Bibliographic Details
Main Authors:	Cheo, K.K.L., Zhou, G., Du, Y., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Published:	2014
Subjects:	angular position sensing grating scanners MEMS micromirrors
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73237
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73237
record_format	dspace
spelling	sg-nus-scholar.10635-732372021-10-25T14:05:55Z Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner Cheo, K.K.L. Zhou, G. Du, Y. Chau, F.S. MECHANICAL ENGINEERING angular position sensing grating scanners MEMS micromirrors 10.1109/OMEMS.2011.6031055 International Conference on Optical MEMS and Nanophotonics 17-18 2014-06-19T05:32:45Z 2014-06-19T05:32:45Z 2011 Cheo, K.K.L., Zhou, G., Du, Y., Chau, F.S. (2011). Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner. International Conference on Optical MEMS and Nanophotonics : 17-18. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2011.6031055 9781457703362 21605033 http://scholarbank.nus.edu.sg/handle/10635/73237 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	angular position sensing grating scanners MEMS micromirrors
spellingShingle	angular position sensing grating scanners MEMS micromirrors Cheo, K.K.L. Zhou, G. Du, Y. Chau, F.S. Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner
description	10.1109/OMEMS.2011.6031055
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Cheo, K.K.L. Zhou, G. Du, Y. Chau, F.S.
author	Cheo, K.K.L. Zhou, G. Du, Y. Chau, F.S.
author_sort	Cheo, K.K.L.
title	Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner
title_short	Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner
title_full	Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner
title_fullStr	Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner
title_full_unstemmed	Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner
title_sort	built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73237
_version_	1715195324683780096

Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner

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