MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution

10.1117/12.901076

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Bibliographic Details
Main Authors: Zhou, G., Du, Y., Cheo, K.K.L., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73602
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Institution: National University of Singapore