MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution
10.1117/12.901076
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Main Authors: | Zhou, G., Du, Y., Cheo, K.K.L., Chau, F.S. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/73602 |
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Institution: | National University of Singapore |
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