A study of the static characteristics of a torsional micromirror

10.1016/S0924-4247(01)00453-8

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Bibliographic Details
Main Authors:	Zhang, X.M., Chau, F.S., Quan, C., Lam, Y.L., Liu, A.Q.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Micromirror MOEMS Optical MEMS Snap-down
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/59286
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Institution:	National University of Singapore

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