A study of the static characteristics of a torsional micromirror

10.1016/S0924-4247(01)00453-8

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Bibliographic Details
Main Authors:	Zhang, X.M., Chau, F.S., Quan, C., Lam, Y.L., Liu, A.Q.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Micromirror MOEMS Optical MEMS Snap-down
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/59286
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-59286
record_format	dspace
spelling	sg-nus-scholar.10635-592862023-10-25T23:31:48Z A study of the static characteristics of a torsional micromirror Zhang, X.M. Chau, F.S. Quan, C. Lam, Y.L. Liu, A.Q. MECHANICAL ENGINEERING Micromirror MOEMS Optical MEMS Snap-down 10.1016/S0924-4247(01)00453-8 Sensors and Actuators, A: Physical 90 1-2 73-81 SAAPE 2014-06-17T06:09:41Z 2014-06-17T06:09:41Z 2001-05-01 Article Zhang, X.M., Chau, F.S., Quan, C., Lam, Y.L., Liu, A.Q. (2001-05-01). A study of the static characteristics of a torsional micromirror. Sensors and Actuators, A: Physical 90 (1-2) : 73-81. ScholarBank@NUS Repository. https://doi.org/10.1016/S0924-4247(01)00453-8 09244247 http://scholarbank.nus.edu.sg/handle/10635/59286 000168013000008 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Micromirror MOEMS Optical MEMS Snap-down
spellingShingle	Micromirror MOEMS Optical MEMS Snap-down Zhang, X.M. Chau, F.S. Quan, C. Lam, Y.L. Liu, A.Q. A study of the static characteristics of a torsional micromirror
description	10.1016/S0924-4247(01)00453-8
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Zhang, X.M. Chau, F.S. Quan, C. Lam, Y.L. Liu, A.Q.
format	Article
author	Zhang, X.M. Chau, F.S. Quan, C. Lam, Y.L. Liu, A.Q.
author_sort	Zhang, X.M.
title	A study of the static characteristics of a torsional micromirror
title_short	A study of the static characteristics of a torsional micromirror
title_full	A study of the static characteristics of a torsional micromirror
title_fullStr	A study of the static characteristics of a torsional micromirror
title_full_unstemmed	A study of the static characteristics of a torsional micromirror
title_sort	study of the static characteristics of a torsional micromirror
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/59286
_version_	1781781599000461312

A study of the static characteristics of a torsional micromirror

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