High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication

High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication

10.1016/j.sna.2009.02.011

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Bibliographic Details
Main Authors: Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Yang, B., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Diffraction grating
Micro-opto-electromechanical systems (MOEMS)
Micro-scanners
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60446
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/60446

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