A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution

A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution

10.1109/TRANSDUCERS.2011.5969767

Saved in:
Bibliographic Details
Main Authors: Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Published: 2014
Subjects:
Diffraction grating
micro resonators
micro scanners
Micro-opto-electromechanical systems (MOEMS)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85854
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/85854

Similar Items