A 50kHz micromachined electrostatic driven vibratory grating laser scanner

A 50kHz micromachined electrostatic driven vibratory grating laser scanner

10.1016/j.phpro.2011.06.166

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Bibliographic Details
Main Authors: Du, Y., Zhou, G., Chau, F.S., Cheo, K.L., Zhang, Q., Feng, H.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Diffraction graitng
Laser scanners
Micro resonator
Micro-opto- electromechanical-systems (MOEMS)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73002
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/73002

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