A 50kHz micromachined electrostatic driven vibratory grating laser scanner

• Main Authors: Du, Y., Zhou, G., Chau, F.S., Cheo, K.L., Zhang, Q., Feng, H.
• Other Authors: MECHANICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Diffraction graitng; Laser scanners; Micro resonator; Micro-opto- electromechanical-systems (MOEMS)
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/73002
• Institution: National University of Singapore

10.1016/j.phpro.2011.06.166