Electrostatic micromachined resonating micro-scanner for circumferential endoscopic bio-imaging

Electrostatic micromachined resonating micro-scanner for circumferential endoscopic bio-imaging

10.1109/LPT.2013.2249057

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Bibliographic Details
Main Authors: Mu, X., Zhou, G., Yu, H., Tsai, J.M.-L., Neo, W.K., Kumar, A.S., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Diamond turning
micro-assembly
microelectromechanical systems
optical coherence tomography
resonating micro-scanners
soft lithography
Online Access:http://scholarbank.nus.edu.sg/handle/10635/60155
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/60155

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