A micromachined vibratory sub-wavelength diffraction grating laser scanner

A micromachined vibratory sub-wavelength diffraction grating laser scanner

10.1109/OMEMS.2008.4607847

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Bibliographic Details
Main Authors: Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Diffraction grating
Micro-opto-electromechanical systems (MOEMS)
Micro-scanners
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73043
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/73043

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