Hyperspectral imaging using a micromachined in-plane vibratory grating scanner

by Zhou, G., Cheo, K.K.L., Du, Y., Chau, F.S.
Published 2014

Built-in optical angular position sensing mechanism for high-resolution vibratory grating scanner

by Cheo, K.K.L., Zhou, G., Du, Y., Chau, F.S.
Published 2014

A spectral line imager based on a MEMS vibratory grating scanner

by Du, Y., Cheo, K.K.L., Zhou, G., Chau, F.S.
Published 2014

Post-corrections of image distortions in a scanning grating-based spectral line imager

by Cheo, K.K.L., Du, Y., Zhou, G., Chau, F.S.
Published 2014

MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution

by Zhou, G., Du, Y., Cheo, K.K.L., Chau, F.S.
Published 2014

An optically interrogated microgyroscope using an out-of-plane lamellar grating

by Zhou, G., Cheo, K.K.L., Du, Y., Chau, F.S.
Published 2014

A novel optical lamellar grating out-of-plane microgyroscope

by Zhou, G., Cheo, K.K.L., Du, Y., Fook, S.C.
Published 2014

Optical scanning with MEMS in-plane vibratory gratings and its applications

by Zhou, G., Du, Y., Cheo, K.K.L., Yu, H., Chau, F.S.
Published 2014

Neural network approach for linearization of the electrostatically actuated double-gimballed micromirror

by Zhou, G., Cheo, K.K.L., Tay, F.E.H., Chau, F.S.
Published 2014

A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution

by Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S.
Published 2014

Synchronized laser scanning of multiple beams by MEMS gratings integrated with resonant frequency fine tuning mechanisms

by Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S.
Published 2014

A 21.5 kHz high optical resolution electrostatic double-layered vibratory grating laser scanner

by Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S.
Published 2014

A high-speed MEMS grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching technique

by Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S.
Published 2014

A micromachined vibratory sub-wavelength diffraction grating laser scanner

by Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S.
Published 2014

Hyperspectral imaging using a microelectrical-mechanical-systems-based in-plane vibratory grating scanner with a single photodetector

by Zhou, G., Cheo, K.K.L., Du, Y., Chau, F.S., Feng, H., Zhang, Q.
Published 2014

High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication

by Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Yang, B., Chau, F.S.
Published 2014