A high-speed MEMS grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching technique

A high-speed MEMS grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching technique

10.1088/0960-1317/20/11/115028

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Bibliographic Details
Main Authors: Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/54253
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/54253

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