A high-speed MEMS grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching technique
10.1088/0960-1317/20/11/115028
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2014
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sg-nus-scholar.10635-542532023-10-25T22:02:45Z A high-speed MEMS grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching technique Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Chau, F.S. MECHANICAL ENGINEERING 10.1088/0960-1317/20/11/115028 Journal of Micromechanics and Microengineering 20 11 - JMMIE 2014-06-16T09:29:11Z 2014-06-16T09:29:11Z 2010-11 Article Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S. (2010-11). A high-speed MEMS grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching technique. Journal of Micromechanics and Microengineering 20 (11) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/20/11/115028 09601317 http://scholarbank.nus.edu.sg/handle/10635/54253 000283691600029 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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| description |
10.1088/0960-1317/20/11/115028 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Chau, F.S. |
| format |
Article |
| author |
Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Chau, F.S. |
| spellingShingle |
Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Chau, F.S. A high-speed MEMS grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching technique |
| author_sort |
Du, Y. |
| title |
A high-speed MEMS grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching technique |
| title_short |
A high-speed MEMS grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching technique |
| title_full |
A high-speed MEMS grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching technique |
| title_fullStr |
A high-speed MEMS grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching technique |
| title_full_unstemmed |
A high-speed MEMS grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching technique |
| title_sort |
high-speed mems grating laser scanner with a backside thinned grating platform fabricated using a single mask delay etching technique |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/54253 |
| _version_ |
1781411955319242752 |