Dynamic characterization of a 2-DOF circular resonator-driven vibratory grating scanner with geometric nonlinearity

Dynamic characterization of a 2-DOF circular resonator-driven vibratory grating scanner with geometric nonlinearity

10.1117/12.852070

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Bibliographic Details
Main Authors: Du, Y., Zhou, G., Chau, F.S., Cheo, K.L., Zhang, Q., Feng, H.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Diffraction grating
Geometric nonlinearity
Micro resonators
Micro scanners
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73380
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/73380

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