Dynamic characterization of a 2-DOF circular resonator-driven vibratory grating scanner with geometric nonlinearity

• Main Authors: Du, Y., Zhou, G., Chau, F.S., Cheo, K.L., Zhang, Q., Feng, H.
• Other Authors: MECHANICAL ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Diffraction grating; Geometric nonlinearity; Micro resonators; Micro scanners
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/73380
• Institution: National University of Singapore

10.1117/12.852070