Double-layered vibratory grating scanners for high-speed high-resolution laser scanning

Double-layered vibratory grating scanners for high-speed high-resolution laser scanning

10.1109/JMEMS.2010.2067440

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Bibliographic Details
Main Authors: Du, Y., Zhou, G., Cheo, K.L., Zhang, Q., Feng, H., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Diffraction grating
microoptoelectromechanical systems (MOEMS)
microresonators
microscanners
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85022
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/85022

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