Double-layered vibratory grating scanners for high-speed high-resolution laser scanning

10.1109/JMEMS.2010.2067440

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Bibliographic Details
Main Authors:	Du, Y., Zhou, G., Cheo, K.L., Zhang, Q., Feng, H., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Diffraction grating microoptoelectromechanical systems (MOEMS) microresonators microscanners
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/85022
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-85022
record_format	dspace
spelling	sg-nus-scholar.10635-850222023-10-26T09:49:15Z Double-layered vibratory grating scanners for high-speed high-resolution laser scanning Du, Y. Zhou, G. Cheo, K.L. Zhang, Q. Feng, H. Chau, F.S. MECHANICAL ENGINEERING Diffraction grating microoptoelectromechanical systems (MOEMS) microresonators microscanners 10.1109/JMEMS.2010.2067440 Journal of Microelectromechanical Systems 19 5 1186-1196 JMIYE 2014-10-07T09:03:05Z 2014-10-07T09:03:05Z 2010-10 Article Du, Y., Zhou, G., Cheo, K.L., Zhang, Q., Feng, H., Chau, F.S. (2010-10). Double-layered vibratory grating scanners for high-speed high-resolution laser scanning. Journal of Microelectromechanical Systems 19 (5) : 1186-1196. ScholarBank@NUS Repository. https://doi.org/10.1109/JMEMS.2010.2067440 10577157 http://scholarbank.nus.edu.sg/handle/10635/85022 000283369500018 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Diffraction grating microoptoelectromechanical systems (MOEMS) microresonators microscanners
spellingShingle	Diffraction grating microoptoelectromechanical systems (MOEMS) microresonators microscanners Du, Y. Zhou, G. Cheo, K.L. Zhang, Q. Feng, H. Chau, F.S. Double-layered vibratory grating scanners for high-speed high-resolution laser scanning
description	10.1109/JMEMS.2010.2067440
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Du, Y. Zhou, G. Cheo, K.L. Zhang, Q. Feng, H. Chau, F.S.
format	Article
author	Du, Y. Zhou, G. Cheo, K.L. Zhang, Q. Feng, H. Chau, F.S.
author_sort	Du, Y.
title	Double-layered vibratory grating scanners for high-speed high-resolution laser scanning
title_short	Double-layered vibratory grating scanners for high-speed high-resolution laser scanning
title_full	Double-layered vibratory grating scanners for high-speed high-resolution laser scanning
title_fullStr	Double-layered vibratory grating scanners for high-speed high-resolution laser scanning
title_full_unstemmed	Double-layered vibratory grating scanners for high-speed high-resolution laser scanning
title_sort	double-layered vibratory grating scanners for high-speed high-resolution laser scanning
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/85022
_version_	1781784562087493632

Double-layered vibratory grating scanners for high-speed high-resolution laser scanning

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