A 50kHz micromachined electrostatic driven vibratory grating laser scanner

10.1016/j.phpro.2011.06.166

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Bibliographic Details
Main Authors:	Du, Y., Zhou, G., Chau, F.S., Cheo, K.L., Zhang, Q., Feng, H.
Other Authors:	MECHANICAL ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Diffraction graitng Laser scanners Micro resonator Micro-opto- electromechanical-systems (MOEMS)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/73002
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-73002
record_format	dspace
spelling	sg-nus-scholar.10635-730022023-10-26T09:29:08Z A 50kHz micromachined electrostatic driven vibratory grating laser scanner Du, Y. Zhou, G. Chau, F.S. Cheo, K.L. Zhang, Q. Feng, H. MECHANICAL ENGINEERING Diffraction graitng Laser scanners Micro resonator Micro-opto- electromechanical-systems (MOEMS) 10.1016/j.phpro.2011.06.166 Physics Procedia 19 308-314 2014-06-19T05:30:02Z 2014-06-19T05:30:02Z 2011 Conference Paper Du, Y., Zhou, G., Chau, F.S., Cheo, K.L., Zhang, Q., Feng, H. (2011). A 50kHz micromachined electrostatic driven vibratory grating laser scanner. Physics Procedia 19 : 308-314. ScholarBank@NUS Repository. https://doi.org/10.1016/j.phpro.2011.06.166 18753884 http://scholarbank.nus.edu.sg/handle/10635/73002 000298564100049 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Diffraction graitng Laser scanners Micro resonator Micro-opto- electromechanical-systems (MOEMS)
spellingShingle	Diffraction graitng Laser scanners Micro resonator Micro-opto- electromechanical-systems (MOEMS) Du, Y. Zhou, G. Chau, F.S. Cheo, K.L. Zhang, Q. Feng, H. A 50kHz micromachined electrostatic driven vibratory grating laser scanner
description	10.1016/j.phpro.2011.06.166
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Du, Y. Zhou, G. Chau, F.S. Cheo, K.L. Zhang, Q. Feng, H.
format	Conference or Workshop Item
author	Du, Y. Zhou, G. Chau, F.S. Cheo, K.L. Zhang, Q. Feng, H.
author_sort	Du, Y.
title	A 50kHz micromachined electrostatic driven vibratory grating laser scanner
title_short	A 50kHz micromachined electrostatic driven vibratory grating laser scanner
title_full	A 50kHz micromachined electrostatic driven vibratory grating laser scanner
title_fullStr	A 50kHz micromachined electrostatic driven vibratory grating laser scanner
title_full_unstemmed	A 50kHz micromachined electrostatic driven vibratory grating laser scanner
title_sort	50khz micromachined electrostatic driven vibratory grating laser scanner
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/73002
_version_	1781783267176873984

A 50kHz micromachined electrostatic driven vibratory grating laser scanner

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