Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy

• Main Authors: Muttikulangara, Sanathanan Swaminathan, Baranski, Maciej, Rehman, Shakil, Hu, Liangxing, Miao, Jianmin
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2020
• Subjects: Engineering::Mechanical engineering; Diffraction Gratings; Diffraction
• Online Access: https://hdl.handle.net/10356/142651
• Institution: Nanyang Technological University

This paper reports a monolithic fabrication of a MEMS rotary stepper motor integrated with a highly efficient diffraction grating to obtain optical transfer function diversity. The rotational motion is achieved by three phase electrostatic actuation mechanism that allows precise stepping motion whic...