Diffraction grating integrated on micromachined stepper motor for diversity implementation in imaging spectroscopy

• Main Authors: Muttikulangara, Sanathanan Swaminathan, Baranski, Maciej, Rehman, Shakil, Hu, Liangxing, Miao, Jianmin
• 其他作者: School of Mechanical and Aerospace Engineering
• 格式: Conference or Workshop Item
• 語言: English
• 出版: 2020
• 主題: Engineering::Mechanical engineering; Diffraction Gratings; Diffraction
• 在線閱讀: https://hdl.handle.net/10356/142651

This paper reports a monolithic fabrication of a MEMS rotary stepper motor integrated with a highly efficient diffraction grating to obtain optical transfer function diversity. The rotational motion is achieved by three phase electrostatic actuation mechanism that allows precise stepping motion whic...