A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution

10.1109/TRANSDUCERS.2011.5969767

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Bibliographic Details
Main Authors:	Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Published:	2014
Subjects:	Diffraction grating micro resonators micro scanners Micro-opto-electromechanical systems (MOEMS)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/85854
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-858542021-10-25T13:52:11Z A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Chau, F.S. MECHANICAL ENGINEERING Diffraction grating micro resonators micro scanners Micro-opto-electromechanical systems (MOEMS) 10.1109/TRANSDUCERS.2011.5969767 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 2546-2549 2014-10-07T09:12:59Z 2014-10-07T09:12:59Z 2011 Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S. (2011). A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution. 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference, TRANSDUCERS'11 : 2546-2549. ScholarBank@NUS Repository. https://doi.org/10.1109/TRANSDUCERS.2011.5969767 9781457701573 http://scholarbank.nus.edu.sg/handle/10635/85854 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Diffraction grating micro resonators micro scanners Micro-opto-electromechanical systems (MOEMS)
spellingShingle	Diffraction grating micro resonators micro scanners Micro-opto-electromechanical systems (MOEMS) Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Chau, F.S. A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution
description	10.1109/TRANSDUCERS.2011.5969767
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Chau, F.S.
author	Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Chau, F.S.
author_sort	Du, Y.
title	A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution
title_short	A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution
title_full	A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution
title_fullStr	A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution
title_full_unstemmed	A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution
title_sort	high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/85854
_version_	1715196299604656128

A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution

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