A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution

• Main Authors: Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S.
• Other Authors: MECHANICAL ENGINEERING
• Published: 2014
• Subjects: Diffraction grating; micro resonators; micro scanners; Micro-opto-electromechanical systems (MOEMS)
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/85854
• Institution: National University of Singapore

10.1109/TRANSDUCERS.2011.5969767