A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution

A high-speed electrostatic double-layered vibratory grating scanner with very high optical resolution

10.1109/TRANSDUCERS.2011.5969767

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Bibliographic Details
Main Authors: Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Published: 2014
Subjects:
Diffraction grating
micro resonators
micro scanners
Micro-opto-electromechanical systems (MOEMS)
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85854
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Institution: National University of Singapore
Description
Summary:10.1109/TRANSDUCERS.2011.5969767

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