High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication

10.1016/j.sna.2009.02.011

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Bibliographic Details
Main Authors:	Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Yang, B., Chau, F.S.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Diffraction grating Micro-opto-electromechanical systems (MOEMS) Micro-scanners
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/60446
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-60446
record_format	dspace
spelling	sg-nus-scholar.10635-604462023-10-30T09:50:19Z High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Yang, B. Chau, F.S. MECHANICAL ENGINEERING Diffraction grating Micro-opto-electromechanical systems (MOEMS) Micro-scanners 10.1016/j.sna.2009.02.011 Sensors and Actuators, A: Physical 156 1 134-144 SAAPE 2014-06-17T06:23:19Z 2014-06-17T06:23:19Z 2009-11 Article Du, Y., Zhou, G., Cheo, K.K.L., Zhang, Q., Feng, H., Yang, B., Chau, F.S. (2009-11). High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication. Sensors and Actuators, A: Physical 156 (1) : 134-144. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2009.02.011 09244247 http://scholarbank.nus.edu.sg/handle/10635/60446 000272636100021 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Diffraction grating Micro-opto-electromechanical systems (MOEMS) Micro-scanners
spellingShingle	Diffraction grating Micro-opto-electromechanical systems (MOEMS) Micro-scanners Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Yang, B. Chau, F.S. High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication
description	10.1016/j.sna.2009.02.011
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Yang, B. Chau, F.S.
format	Article
author	Du, Y. Zhou, G. Cheo, K.K.L. Zhang, Q. Feng, H. Yang, B. Chau, F.S.
author_sort	Du, Y.
title	High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication
title_short	High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication
title_full	High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication
title_fullStr	High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication
title_full_unstemmed	High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication
title_sort	high speed laser scanning using mems driven in-plane vibratory grating: design, modeling and fabrication
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/60446
_version_	1781781843040796672

High speed laser scanning using MEMS driven in-plane vibratory grating: Design, modeling and fabrication

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