MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution

MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution

10.1117/12.901076

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Bibliographic Details
Main Authors: Zhou, G., Du, Y., Cheo, K.K.L., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Diffraction Gratings
MEMS
Micromirrors
Optical Scanners
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73602
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Institution: National University of Singapore
id sg-nus-scholar.10635-73602
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spelling sg-nus-scholar.10635-736022023-10-26T07:13:38Z MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution Zhou, G. Du, Y. Cheo, K.K.L. Chau, F.S. MECHANICAL ENGINEERING Diffraction Gratings MEMS Micromirrors Optical Scanners 10.1117/12.901076 Proceedings of SPIE - The International Society for Optical Engineering 8191 - PSISD 2014-06-19T05:37:07Z 2014-06-19T05:37:07Z 2011 Conference Paper Zhou, G., Du, Y., Cheo, K.K.L., Chau, F.S. (2011). MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution. Proceedings of SPIE - The International Society for Optical Engineering 8191 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.901076 9780819488329 0277786X http://scholarbank.nus.edu.sg/handle/10635/73602 000297572400005 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Diffraction Gratings
MEMS
Micromirrors
Optical Scanners
spellingShingle Diffraction Gratings
MEMS
Micromirrors
Optical Scanners
Zhou, G.
Du, Y.
Cheo, K.K.L.
Chau, F.S.
MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution
description 10.1117/12.901076
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Zhou, G.
Du, Y.
Cheo, K.K.L.
Chau, F.S.
format Conference or Workshop Item
author Zhou, G.
Du, Y.
Cheo, K.K.L.
Chau, F.S.
author_sort Zhou, G.
title MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution
title_short MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution
title_full MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution
title_fullStr MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution
title_full_unstemmed MEMS-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution
title_sort mems-driven diffraction gratings for rapid scanning of laser beams with very high optical resolution
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/73602
_version_ 1781783319598333952

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