Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications

10.1016/j.sna.2012.06.018

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Bibliographic Details
Main Authors: Koh, K.H., Kobayashi, T., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
PZT
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82577
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Institution: National University of Singapore