Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications
10.1016/j.sna.2012.06.018
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Main Authors: | , , |
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Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/82577 |
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Institution: | National University of Singapore |