Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors

Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors

10.1016/j.sna.2010.04.021

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Bibliographic Details
Main Authors: Koh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Micro-electro-mechanical systems (MEMS)
Micromirror
Optical MEMS
Piezoelectric actuator
PZT
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83543
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/83543

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