Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors

10.1016/j.sna.2010.04.021

Saved in:

Bibliographic Details
Main Authors:	Koh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Micro-electro-mechanical systems (MEMS) Micromirror Optical MEMS Piezoelectric actuator PZT
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83543
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

id	sg-nus-scholar.10635-83543
record_format	dspace
spelling	sg-nus-scholar.10635-835432023-10-30T07:14:05Z Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors Koh, K.H. Kobayashi, T. Hsiao, F.-L. Lee, C. ELECTRICAL & COMPUTER ENGINEERING Micro-electro-mechanical systems (MEMS) Micromirror Optical MEMS Piezoelectric actuator PZT 10.1016/j.sna.2010.04.021 Sensors and Actuators, A: Physical 162 2 336-347 SAAPE 2014-10-07T04:42:24Z 2014-10-07T04:42:24Z 2010-08 Conference Paper Koh, K.H., Kobayashi, T., Hsiao, F.-L., Lee, C. (2010-08). Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors. Sensors and Actuators, A: Physical 162 (2) : 336-347. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2010.04.021 09244247 http://scholarbank.nus.edu.sg/handle/10635/83543 000282923900031 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Micro-electro-mechanical systems (MEMS) Micromirror Optical MEMS Piezoelectric actuator PZT
spellingShingle	Micro-electro-mechanical systems (MEMS) Micromirror Optical MEMS Piezoelectric actuator PZT Koh, K.H. Kobayashi, T. Hsiao, F.-L. Lee, C. Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors
description	10.1016/j.sna.2010.04.021
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Koh, K.H. Kobayashi, T. Hsiao, F.-L. Lee, C.
format	Conference or Workshop Item
author	Koh, K.H. Kobayashi, T. Hsiao, F.-L. Lee, C.
author_sort	Koh, K.H.
title	Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors
title_short	Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors
title_full	Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors
title_fullStr	Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors
title_full_unstemmed	Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors
title_sort	characterization of piezoelectric pzt beam actuators for driving 2d scanning micromirrors
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83543
_version_	1781784365980712960

Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors

Similar Items