Design, modeling and fabrication of thermal actuated micromirror for fine-tracking mechanism of high-density optical data storage

Master's

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Bibliographic Details
Main Author: DENG XIAOCHONG
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Theses and Dissertations
Language:English
Published: 2010
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/14796
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Institution: National University of Singapore
Language: English