Design, modeling and fabrication of thermal actuated micromirror for fine-tracking mechanism of high-density optical data storage

Master's

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Bibliographic Details
Main Author:	DENG XIAOCHONG
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Theses and Dissertations
Language:	English
Published:	2010
Subjects:	thermal actuator, micromirror, MEMS, optical data storage
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/14796
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Institution:	National University of Singapore
Language:	English

id	sg-nus-scholar.10635-14796
record_format	dspace
spelling	sg-nus-scholar.10635-147962017-10-21T05:50:51Z Design, modeling and fabrication of thermal actuated micromirror for fine-tracking mechanism of high-density optical data storage DENG XIAOCHONG ELECTRICAL & COMPUTER ENGINEERING CHONG TOW CHONG thermal actuator, micromirror, MEMS, optical data storage Master's MASTER OF ENGINEERING 2010-04-08T10:46:52Z 2010-04-08T10:46:52Z 2005-07-30 Thesis DENG XIAOCHONG (2005-07-30). Design, modeling and fabrication of thermal actuated micromirror for fine-tracking mechanism of high-density optical data storage. ScholarBank@NUS Repository. http://scholarbank.nus.edu.sg/handle/10635/14796 NOT_IN_WOS en
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
language	English
topic	thermal actuator, micromirror, MEMS, optical data storage
spellingShingle	thermal actuator, micromirror, MEMS, optical data storage DENG XIAOCHONG Design, modeling and fabrication of thermal actuated micromirror for fine-tracking mechanism of high-density optical data storage
description	Master's
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING DENG XIAOCHONG
format	Theses and Dissertations
author	DENG XIAOCHONG
author_sort	DENG XIAOCHONG
title	Design, modeling and fabrication of thermal actuated micromirror for fine-tracking mechanism of high-density optical data storage
title_short	Design, modeling and fabrication of thermal actuated micromirror for fine-tracking mechanism of high-density optical data storage
title_full	Design, modeling and fabrication of thermal actuated micromirror for fine-tracking mechanism of high-density optical data storage
title_fullStr	Design, modeling and fabrication of thermal actuated micromirror for fine-tracking mechanism of high-density optical data storage
title_full_unstemmed	Design, modeling and fabrication of thermal actuated micromirror for fine-tracking mechanism of high-density optical data storage
title_sort	design, modeling and fabrication of thermal actuated micromirror for fine-tracking mechanism of high-density optical data storage
publishDate	2010
url	http://scholarbank.nus.edu.sg/handle/10635/14796
_version_	1681079087135719424

Design, modeling and fabrication of thermal actuated micromirror for fine-tracking mechanism of high-density optical data storage

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