Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications

10.1016/j.sna.2012.06.018

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Bibliographic Details
Main Authors:	Koh, K.H., Kobayashi, T., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Microelectromechanical systems (MEMS) Micromirror Optical MEMS Piezoelectric actuator PZT
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82577
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-82577
record_format	dspace
spelling	sg-nus-scholar.10635-825772024-11-09T08:00:49Z Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications Koh, K.H. Kobayashi, T. Lee, C. ELECTRICAL & COMPUTER ENGINEERING Microelectromechanical systems (MEMS) Micromirror Optical MEMS Piezoelectric actuator PZT 10.1016/j.sna.2012.06.018 Sensors and Actuators, A: Physical 184 149-159 SAAPE 2014-10-07T04:31:01Z 2014-10-07T04:31:01Z 2012-09 Article Koh, K.H., Kobayashi, T., Lee, C. (2012-09). Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications. Sensors and Actuators, A: Physical 184 : 149-159. ScholarBank@NUS Repository. https://doi.org/10.1016/j.sna.2012.06.018 09244247 http://scholarbank.nus.edu.sg/handle/10635/82577 000308452200022 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Microelectromechanical systems (MEMS) Micromirror Optical MEMS Piezoelectric actuator PZT
spellingShingle	Microelectromechanical systems (MEMS) Micromirror Optical MEMS Piezoelectric actuator PZT Koh, K.H. Kobayashi, T. Lee, C. Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications
description	10.1016/j.sna.2012.06.018
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Koh, K.H. Kobayashi, T. Lee, C.
format	Article
author	Koh, K.H. Kobayashi, T. Lee, C.
author_sort	Koh, K.H.
title	Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications
title_short	Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications
title_full	Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications
title_fullStr	Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications
title_full_unstemmed	Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications
title_sort	investigation of piezoelectric driven mems mirrors based on single and double s-shaped pzt actuator for 2-d scanning applications
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82577
_version_	1821218618534264832

Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications

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