Investigation of piezoelectric driven MEMS mirrors based on single and double S-shaped PZT actuator for 2-D scanning applications

10.1016/j.sna.2012.06.018

Saved in:
Bibliographic Details
Main Authors: Koh, K.H., Kobayashi, T., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Subjects:
PZT
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82577
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: National University of Singapore

Similar Items