A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations

A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations

10.1016/j.phpro.2011.06.136

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Bibliographic Details
Main Authors: Liu, H., Quan, C., Tay, C.J., Kobayashi, T., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Energy harvesting
Low frequency vibrations
Microelectromechanical Systems (MEMS)
Piezoelectric cantilever
Series and parallel
Online Access:http://scholarbank.nus.edu.sg/handle/10635/68872
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/68872

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