A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations

• Main Authors: Liu, H., Quan, C., Tay, C.J., Kobayashi, T., Lee, C.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: Energy harvesting; Low frequency vibrations; Microelectromechanical Systems (MEMS); Piezoelectric cantilever; Series and parallel
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/68872
• Institution: National University of Singapore

10.1016/j.phpro.2011.06.136