A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations

10.1016/j.phpro.2011.06.136

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Bibliographic Details
Main Authors:	Liu, H., Quan, C., Tay, C.J., Kobayashi, T., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Energy harvesting Low frequency vibrations Microelectromechanical Systems (MEMS) Piezoelectric cantilever Series and parallel
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/68872
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-68872
record_format	dspace
spelling	sg-nus-scholar.10635-688722023-10-26T21:26:18Z A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations Liu, H. Quan, C. Tay, C.J. Kobayashi, T. Lee, C. ELECTRICAL & COMPUTER ENGINEERING MECHANICAL ENGINEERING Energy harvesting Low frequency vibrations Microelectromechanical Systems (MEMS) Piezoelectric cantilever Series and parallel 10.1016/j.phpro.2011.06.136 Physics Procedia 19 129-133 2014-06-19T02:54:12Z 2014-06-19T02:54:12Z 2011 Conference Paper Liu, H., Quan, C., Tay, C.J., Kobayashi, T., Lee, C. (2011). A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations. Physics Procedia 19 : 129-133. ScholarBank@NUS Repository. https://doi.org/10.1016/j.phpro.2011.06.136 18753884 http://scholarbank.nus.edu.sg/handle/10635/68872 000298564100019 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Energy harvesting Low frequency vibrations Microelectromechanical Systems (MEMS) Piezoelectric cantilever Series and parallel
spellingShingle	Energy harvesting Low frequency vibrations Microelectromechanical Systems (MEMS) Piezoelectric cantilever Series and parallel Liu, H. Quan, C. Tay, C.J. Kobayashi, T. Lee, C. A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations
description	10.1016/j.phpro.2011.06.136
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Liu, H. Quan, C. Tay, C.J. Kobayashi, T. Lee, C.
format	Conference or Workshop Item
author	Liu, H. Quan, C. Tay, C.J. Kobayashi, T. Lee, C.
author_sort	Liu, H.
title	A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations
title_short	A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations
title_full	A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations
title_fullStr	A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations
title_full_unstemmed	A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations
title_sort	mems-based piezoelectric cantilever patterned with pzt thin film array for harvesting energy from low frequency vibrations
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/68872
_version_	1781783069313728512

A MEMS-based piezoelectric cantilever patterned with PZT thin film array for harvesting energy from low frequency vibrations

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