Development of CMOS MEMS thermal bimorph actuator for driving microlens

Development of CMOS MEMS thermal bimorph actuator for driving microlens

10.1109/OMEMS.2011.6031057

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Bibliographic Details
Main Authors: Koh, K.H., Lee, C., Lu, J.-H., Chen, C.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Microlens
Optical Microelectromechanical Systems
Thermal Actuator
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83625
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/83625

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