Development of CMOS MEMS thermal bimorph actuator for driving microlens

10.1109/OMEMS.2011.6031057

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Bibliographic Details
Main Authors:	Koh, K.H., Lee, C., Lu, J.-H., Chen, C.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Subjects:	Microlens Optical Microelectromechanical Systems Thermal Actuator
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83625
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83625
record_format	dspace
spelling	sg-nus-scholar.10635-836252015-03-08T10:19:01Z Development of CMOS MEMS thermal bimorph actuator for driving microlens Koh, K.H. Lee, C. Lu, J.-H. Chen, C.-C. ELECTRICAL & COMPUTER ENGINEERING Microlens Optical Microelectromechanical Systems Thermal Actuator 10.1109/OMEMS.2011.6031057 International Conference on Optical MEMS and Nanophotonics 153-154 2014-10-07T04:43:19Z 2014-10-07T04:43:19Z 2011 Conference Paper Koh, K.H.,Lee, C.,Lu, J.-H.,Chen, C.-C. (2011). Development of CMOS MEMS thermal bimorph actuator for driving microlens. International Conference on Optical MEMS and Nanophotonics : 153-154. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/OMEMS.2011.6031057" target="_blank">https://doi.org/10.1109/OMEMS.2011.6031057</a> 9781457703362 21605033 http://scholarbank.nus.edu.sg/handle/10635/83625 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
topic	Microlens Optical Microelectromechanical Systems Thermal Actuator
spellingShingle	Microlens Optical Microelectromechanical Systems Thermal Actuator Koh, K.H. Lee, C. Lu, J.-H. Chen, C.-C. Development of CMOS MEMS thermal bimorph actuator for driving microlens
description	10.1109/OMEMS.2011.6031057
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Koh, K.H. Lee, C. Lu, J.-H. Chen, C.-C.
format	Conference or Workshop Item
author	Koh, K.H. Lee, C. Lu, J.-H. Chen, C.-C.
author_sort	Koh, K.H.
title	Development of CMOS MEMS thermal bimorph actuator for driving microlens
title_short	Development of CMOS MEMS thermal bimorph actuator for driving microlens
title_full	Development of CMOS MEMS thermal bimorph actuator for driving microlens
title_fullStr	Development of CMOS MEMS thermal bimorph actuator for driving microlens
title_full_unstemmed	Development of CMOS MEMS thermal bimorph actuator for driving microlens
title_sort	development of cmos mems thermal bimorph actuator for driving microlens
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83625
_version_	1681089470378541056

Development of CMOS MEMS thermal bimorph actuator for driving microlens

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