Fabrication and characterization of PZT string based MEMS devices

Fabrication and characterization of PZT string based MEMS devices

p. 214-219

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書目詳細資料
Main Authors: D.T. Huong Giang, N.H. Duc, G. Agnus, T. Maroutian, P. Lecoeur
格式: Article
語言:English
出版: ĐHQGHN 2017
主題:
Piezoelectric
Clampedeclamped beam
String based MEMS
CeV characteristics
Optical interferometer profiler
在線閱讀:http://repository.vnu.edu.vn/handle/VNU_123/58322
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