Fabrication and characterization of PZT string based MEMS devices
p. 214-219
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| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
ĐHQGHN
2017
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| Subjects: | |
| Online Access: | http://repository.vnu.edu.vn/handle/VNU_123/58322 |
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| Institution: | Vietnam National University, Hanoi |
| Language: | English |