An electrostatically-driven MEMS tunable miniature iris diaphragm

An electrostatically-driven MEMS tunable miniature iris diaphragm

10.1109/OMEMS.2012.6318854

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Bibliographic Details
Main Authors: Yu, H., Zhou, G., Chau, F.S.
Other Authors: MECHANICAL ENGINEERING
Published: 2014
Subjects:
blade
MEMS
octagonal aperture
T-shaped beam
Tunable iris diaphragm
Online Access:http://scholarbank.nus.edu.sg/handle/10635/73165
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Institution: National University of Singapore

Internet

http://scholarbank.nus.edu.sg/handle/10635/73165

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