An electrostatically-driven MEMS tunable miniature iris diaphragm
10.1109/OMEMS.2012.6318854
Saved in:
| Main Authors: | , , |
|---|---|
| Other Authors: | |
| Format: | Conference or Workshop Item |
| Published: |
2014
|
| Subjects: | |
| Online Access: | http://scholarbank.nus.edu.sg/handle/10635/73165 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | National University of Singapore |
| id |
sg-nus-scholar.10635-73165 |
|---|---|
| record_format |
dspace |
| spelling |
sg-nus-scholar.10635-731652024-11-14T17:55:15Z An electrostatically-driven MEMS tunable miniature iris diaphragm Yu, H. Zhou, G. Chau, F.S. MECHANICAL ENGINEERING blade MEMS octagonal aperture T-shaped beam Tunable iris diaphragm 10.1109/OMEMS.2012.6318854 International Conference on Optical MEMS and Nanophotonics 164-165 2014-06-19T05:31:55Z 2014-06-19T05:31:55Z 2012 Conference Paper Yu, H., Zhou, G., Chau, F.S. (2012). An electrostatically-driven MEMS tunable miniature iris diaphragm. International Conference on Optical MEMS and Nanophotonics : 164-165. ScholarBank@NUS Repository. https://doi.org/10.1109/OMEMS.2012.6318854 9781457715112 21605033 http://scholarbank.nus.edu.sg/handle/10635/73165 NOT_IN_WOS Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
| country |
Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
blade MEMS octagonal aperture T-shaped beam Tunable iris diaphragm |
| spellingShingle |
blade MEMS octagonal aperture T-shaped beam Tunable iris diaphragm Yu, H. Zhou, G. Chau, F.S. An electrostatically-driven MEMS tunable miniature iris diaphragm |
| description |
10.1109/OMEMS.2012.6318854 |
| author2 |
MECHANICAL ENGINEERING |
| author_facet |
MECHANICAL ENGINEERING Yu, H. Zhou, G. Chau, F.S. |
| format |
Conference or Workshop Item |
| author |
Yu, H. Zhou, G. Chau, F.S. |
| author_sort |
Yu, H. |
| title |
An electrostatically-driven MEMS tunable miniature iris diaphragm |
| title_short |
An electrostatically-driven MEMS tunable miniature iris diaphragm |
| title_full |
An electrostatically-driven MEMS tunable miniature iris diaphragm |
| title_fullStr |
An electrostatically-driven MEMS tunable miniature iris diaphragm |
| title_full_unstemmed |
An electrostatically-driven MEMS tunable miniature iris diaphragm |
| title_sort |
electrostatically-driven mems tunable miniature iris diaphragm |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/73165 |
| _version_ |
1821198338333081600 |