Fabrication and characterization of PZT string based MEMS devices

p. 214-219

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Bibliographic Details
Main Authors:	D.T. Huong Giang, N.H. Duc, G. Agnus, T. Maroutian, P. Lecoeur
Format:	Article
Language:	English
Published:	ĐHQGHN 2017
Subjects:	Piezoelectric Clampedeclamped beam String based MEMS CeV characteristics Optical interferometer profiler
Online Access:	http://repository.vnu.edu.vn/handle/VNU_123/58322
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Institution:	Vietnam National University, Hanoi
Language:	English

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Summary:	p. 214-219

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