Determination of a micromirror angular rotation using laser interferometric method

10.1016/S0030-4018(01)01199-3

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Bibliographic Details
Main Authors:	Tay, C.J., Quan, C., Wang, S.H., Shang, H.M.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Angular rotation Laser interferometry Micromirror Optical MEMS
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/59878
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-59878
record_format	dspace
spelling	sg-nus-scholar.10635-598782023-10-30T08:13:37Z Determination of a micromirror angular rotation using laser interferometric method Tay, C.J. Quan, C. Wang, S.H. Shang, H.M. MECHANICAL ENGINEERING Angular rotation Laser interferometry Micromirror Optical MEMS 10.1016/S0030-4018(01)01199-3 Optics Communications 195 1-4 71-77 OPCOB 2014-06-17T06:16:39Z 2014-06-17T06:16:39Z 2001-08 Article Tay, C.J., Quan, C., Wang, S.H., Shang, H.M. (2001-08). Determination of a micromirror angular rotation using laser interferometric method. Optics Communications 195 (1-4) : 71-77. ScholarBank@NUS Repository. https://doi.org/10.1016/S0030-4018(01)01199-3 00304018 http://scholarbank.nus.edu.sg/handle/10635/59878 000170134300009 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Angular rotation Laser interferometry Micromirror Optical MEMS
spellingShingle	Angular rotation Laser interferometry Micromirror Optical MEMS Tay, C.J. Quan, C. Wang, S.H. Shang, H.M. Determination of a micromirror angular rotation using laser interferometric method
description	10.1016/S0030-4018(01)01199-3
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Tay, C.J. Quan, C. Wang, S.H. Shang, H.M.
format	Article
author	Tay, C.J. Quan, C. Wang, S.H. Shang, H.M.
author_sort	Tay, C.J.
title	Determination of a micromirror angular rotation using laser interferometric method
title_short	Determination of a micromirror angular rotation using laser interferometric method
title_full	Determination of a micromirror angular rotation using laser interferometric method
title_fullStr	Determination of a micromirror angular rotation using laser interferometric method
title_full_unstemmed	Determination of a micromirror angular rotation using laser interferometric method
title_sort	determination of a micromirror angular rotation using laser interferometric method
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/59878
_version_	1781781720232624128

Determination of a micromirror angular rotation using laser interferometric method

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