Determination of a micromirror angular rotation using laser interferometric method
10.1016/S0030-4018(01)01199-3
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Main Authors: | Tay, C.J., Quan, C., Wang, S.H., Shang, H.M. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/59878 |
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Institution: | National University of Singapore |
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