Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry

Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry

10.1117/1.1525795

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Bibliographic Details
Main Authors: Quan, C., Wang, S.H., Tay, C.J., Liu, A.Q., Shang, H.M.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Laser interferometry
Membrane
Micro-rf switches
Nondestructive evaluation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59848
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Institution: National University of Singapore
id sg-nus-scholar.10635-59848
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spelling sg-nus-scholar.10635-598482024-11-13T04:24:25Z Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry Quan, C. Wang, S.H. Tay, C.J. Liu, A.Q. Shang, H.M. MECHANICAL ENGINEERING Laser interferometry Membrane Micro-rf switches Nondestructive evaluation 10.1117/1.1525795 Optical Engineering 42 1 92-97 OPEGA 2014-06-17T06:16:19Z 2014-06-17T06:16:19Z 2003-01 Article Quan, C., Wang, S.H., Tay, C.J., Liu, A.Q., Shang, H.M. (2003-01). Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry. Optical Engineering 42 (1) : 92-97. ScholarBank@NUS Repository. https://doi.org/10.1117/1.1525795 00913286 http://scholarbank.nus.edu.sg/handle/10635/59848 000181531300014 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Laser interferometry
Membrane
Micro-rf switches
Nondestructive evaluation
spellingShingle Laser interferometry
Membrane
Micro-rf switches
Nondestructive evaluation
Quan, C.
Wang, S.H.
Tay, C.J.
Liu, A.Q.
Shang, H.M.
Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry
description 10.1117/1.1525795
author2 MECHANICAL ENGINEERING
author_facet MECHANICAL ENGINEERING
Quan, C.
Wang, S.H.
Tay, C.J.
Liu, A.Q.
Shang, H.M.
format Article
author Quan, C.
Wang, S.H.
Tay, C.J.
Liu, A.Q.
Shang, H.M.
author_sort Quan, C.
title Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry
title_short Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry
title_full Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry
title_fullStr Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry
title_full_unstemmed Deformation measurement of a micro-rf capacitive switch membrane using laser interferometry
title_sort deformation measurement of a micro-rf capacitive switch membrane using laser interferometry
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/59848
_version_ 1821211532974882816

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