Deformation measurement of MEMS components using optical interferometry

Deformation measurement of MEMS components using optical interferometry

10.1088/0957-0233/14/7/303

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Bibliographic Details
Main Authors: Wang, S.H., Quan, C., Tay, C.J., Reading, I., Fang, Z.P.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Subjects:
Accelerometer
Deformation measurement
Microphone
Optical interferometry
Uncertainty evaluation
Online Access:http://scholarbank.nus.edu.sg/handle/10635/59849
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Institution: National University of Singapore
Description
Summary:10.1088/0957-0233/14/7/303

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