Deformation measurement of MEMS components using optical interferometry

10.1088/0957-0233/14/7/303

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Bibliographic Details
Main Authors:	Wang, S.H., Quan, C., Tay, C.J., Reading, I., Fang, Z.P.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Subjects:	Accelerometer Deformation measurement Microphone Optical interferometry Uncertainty evaluation
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/59849
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-59849
record_format	dspace
spelling	sg-nus-scholar.10635-598492023-10-31T07:08:03Z Deformation measurement of MEMS components using optical interferometry Wang, S.H. Quan, C. Tay, C.J. Reading, I. Fang, Z.P. MECHANICAL ENGINEERING Accelerometer Deformation measurement Microphone Optical interferometry Uncertainty evaluation 10.1088/0957-0233/14/7/303 Measurement Science and Technology 14 7 909-915 MSTCE 2014-06-17T06:16:20Z 2014-06-17T06:16:20Z 2003-07 Article Wang, S.H., Quan, C., Tay, C.J., Reading, I., Fang, Z.P. (2003-07). Deformation measurement of MEMS components using optical interferometry. Measurement Science and Technology 14 (7) : 909-915. ScholarBank@NUS Repository. https://doi.org/10.1088/0957-0233/14/7/303 09570233 http://scholarbank.nus.edu.sg/handle/10635/59849 000185269000004 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Accelerometer Deformation measurement Microphone Optical interferometry Uncertainty evaluation
spellingShingle	Accelerometer Deformation measurement Microphone Optical interferometry Uncertainty evaluation Wang, S.H. Quan, C. Tay, C.J. Reading, I. Fang, Z.P. Deformation measurement of MEMS components using optical interferometry
description	10.1088/0957-0233/14/7/303
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Wang, S.H. Quan, C. Tay, C.J. Reading, I. Fang, Z.P.
format	Article
author	Wang, S.H. Quan, C. Tay, C.J. Reading, I. Fang, Z.P.
author_sort	Wang, S.H.
title	Deformation measurement of MEMS components using optical interferometry
title_short	Deformation measurement of MEMS components using optical interferometry
title_full	Deformation measurement of MEMS components using optical interferometry
title_fullStr	Deformation measurement of MEMS components using optical interferometry
title_full_unstemmed	Deformation measurement of MEMS components using optical interferometry
title_sort	deformation measurement of mems components using optical interferometry
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/59849
_version_	1781781714632179712

Deformation measurement of MEMS components using optical interferometry

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