Surface roughness and wettability correlation on etched platinum using reactive ion ecthing

by Zaliman, Sauli, Dr., Retnasamy, Vithyacharan, Aaron, Koay Terr Yeow, Goh, Siew Chui, Khairul Anwar, Mohamad Khazali, Nooraihan, Abdullah
Published 2014

Wettability analysis on platinum deposited wafer after reactive ion ecthing using SF6+argon/CF4+argon gaseous

by Retnasamy, Vithyacharan, Zaliman, Sauli, Dr., Aaron, Koay Terr Yeow, Goh, Siew Chui, Kamarudin, Hussin, Brig. Jen. Dato' Prof. Dr.
Published 2014