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Helmersson, Ulf
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Helmersson, Ulf
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Helmersson, Ulf
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Process stabilization by peak current regulation in reactive high-power impulse magnetron sputtering of hafnium nitride
by
Shimizu, Tetsuhide
,
Villamayor, Michelle Marie S.
,
Lundin, Daniel
,
Helmersson
,
Ulf
Published 2016
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